Leybold 4S065-171 Digital Controller

Leybold 4S065-171 Digital Controller 

 Introduction

Nikon 4S065-171 is a vacuum digital controller for lithography machines, which controls the operation of molecular pumps and is commonly used for replacing spare parts in Nikon lithography equipment.

5 product features:

1. Adapt to the magnetic levitation molecular pump of the machine, with closed-loop speed control and stable operating speed.

2. Real time collection of pump body speed, temperature, and current, with fault codes transmitted back to the machine for easy troubleshooting.

3. Integrated blowdown and deflation logic control, suitable for vacuum working conditions in photolithography processes.

4. Built in multiple protections for overcurrent, overheating, and rotor stall to prevent damage to the pump rotor.

5. Board type slot installation, native interface matching, easy on-site disassembly and replacement.

5 product parameters:

1. The machine cabinet is powered by DC24V.

2. Support internal dedicated bus communication and interaction within the device.

3. Equipped with digital IO signals to achieve start stop and alarm output.

4. Plug in card structure, compatible with standard card slots of lithography machines.

5. The working environment temperature is 18-28 ℃, suitable for ultra clean workshops.

5 application areas:

1. Nikon series lithography machine molecular pump drive control.

2. Spare parts for vacuum chamber system of lithography equipment.

3. High vacuum unit monitoring component for wafer exposure machine.

4. Replace the faulty controller of Nikon's old lithography machine.

5. Maintenance of vacuum system in semiconductor lithography production line.

Overall, Nikon 4S065-171 belongs to the exclusive controller for lithography equipment. There are many spare parts available on the market, and the hardware version should be checked before use to confirm compatibility with the molecular pump and machine software.

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