CTI-Cryogenics 8120646G002 water pump

CTI-Cryogenics 8120646G002 water pump 

 Introduction

CTI Cryogenics 8120646G002 onboard low-temperature water vapor pump, a specialized low-temperature water vapor extraction pump for semiconductor chambers, is commonly used for spare parts replacement in AMAT process equipment.

5 product features:

1. Targeting efficient extraction of water vapor, reducing the background time of cavity extraction, and improving equipment production capacity.

2. Low temperature condensation working mode, selective adsorption of water vapor, with minimal impact on process gases.

3. Equipped with regeneration function, it can defrost online and reduce the frequency of equipment shutdown maintenance.

4. The machine cavity has a direct installation structure, with a native matching installation interface, making it easy to disassemble and assemble on site.

5. Built in status monitoring, temperature alarm signal output, convenient for quick troubleshooting.

5 product parameters:

1. High speed water vapor extraction, suitable for PVD etching process chambers.

2. Equipped with a helium compressor to drive refrigeration.

3. Support device bus communication and feedback pump operation status.

4. Install the cavity flange directly.

5. The working environment temperature is 10-40 ℃, suitable for ultra clean workshops.

5 application areas:

1. AMAT semiconductor PVD coating chamber water vapor extraction.

2. Etching process chamber assisted vacuum acquisition unit.

3. Spare parts for improving the background vacuum of thin film deposition equipment.

4. Reduce water vapor pollution in semiconductor process chambers.

5. Replace the old machine's low-temperature water vapor pump due to malfunction.

Overall, CTI Cryogenics 8120646G002 belongs to the semiconductor specific low-temperature water vapor pump, which is often disassembled and refurbished in the market. It undergoes regeneration and low-temperature performance testing before being put into the process.

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