TURBOVAC 410400V0715 Turbopump

TURBOVAC 410400V0715 Turbopump 

 Introduction

TURBOVAC 410400V0715 magnetic levitation turbo molecular pump, Leybold MAG W400iPL integrated drive molecular pump, commonly used spare parts for semiconductor high vacuum equipment.

5 product features:

1. Fully magnetic levitation bearings, oil-free and non-contact, will not cause oil pollution to the process chamber.

2. Built in integrated frequency converter, no need for external controller, simplifying the wiring of the entire vacuum system.

3. Support blowing gas connection, which can resist some corrosive process gases and reduce internal deposits.

4. Supports installation in any orientation, flexible cabinet layout, and adapts to various device installation spaces.

5. Real time monitoring of speed, temperature, and current, with multiple protections and timely alarm for abnormal states.

5 product parameters:

1. Nitrogen pumping rate is 365L/s.

2. The ultimate vacuum can reach 1 × 10 ⁻⁸ mbar.

3. Comes with a built-in communication interface, supports RS485, and can be connected to device hosts.

4. Air cooled cooling, DN160 intake flange.

5. The working environment temperature is 10-40 ℃.

5 application areas:

1. High vacuum main pump for semiconductor PVD coating equipment.

2. Etching process chamber vacuum acquisition unit.

3. Vacuum system for optical coating equipment.

4. High vacuum system for mass spectrometry and electron microscopy analysis instruments.

5. Replacement of old vacuum equipment turbo pump malfunction.

Overall, TURBOVAC 410400V0715 belongs to an integrated magnetic levitation molecular pump, which is mostly disassembled and refurbished in the market. The rotor and drive status are checked before being put into process use.

Product imag

ontroller Module

ANYBUS AB7000-C gateway module
DAPU100 3ASC25H204 gateway module
E69F-B12-S converter module

Other website links

07KT94 伺服驱动器
AB 1756-L71 处理器模块
PROSOFT MVI56-101S 输入输出模块