Nikon 4S288-370-1 preamplifier unit

Nikon 4S288-370-1 preamplifier unit 

 Introduction

Nikon 4S288-370-1 is a preamplifier unit for immersion lithography piezoelectric sensors, compatible with NSR-S620D machines, responsible for amplifying weak displacement signals and commonly used for machine spare parts replacement.

5 product features:

1. High gain and low-noise amplification for precise processing of weak displacement signals from piezoelectric sensors.

2. Stable signal output ensures nanometer level positioning and detection accuracy of the workpiece table.

3. Anti electromagnetic interference, suitable for the complex electromagnetic process environment inside the lithography machine.

4. Original factory connector matching, plug and play, on-site disassembly without the need to modify wiring.

5. Equipped with signal anomaly self-test and fault signal feedback, the machine is easy to troubleshoot.

5 product parameters:

1. The machine is powered by DC24V.

2. Adapt to Queensgate piezoelectric sensor signal circuit.

3. Simulate signal output and connect to the machine control board.

4. Board mounted slot installation.

5. The working temperature is 18-26 ℃, suitable for photolithography ultra clean workshops.

5 application areas:

1. Nikon NSR-S620D immersion lithography machine stage signal acquisition.

2. Photolithography equipment piezoelectric displacement sensing signal amplification unit.

3. High precision position detection system for exposure platform.

4. Spare parts for faulty amplifiers in ArF scanning lithography machines.

5. Repair and replacement of the sensing circuit on the workpiece stage of the lithography production line.

Overall, Nikon 4S288-370-1 is a precision amplification component specifically designed for lithography equipment. There are many spare parts available on the market, and signal calibration is completed before installation to verify that the hardware version matches the machine before being put into production.

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