Tokyo Electron 370-5396-03 Controller Unit

Tokyo Electron 370-5396-03 Controller Unit

Product Details Introduction

The Tokyo Electron 370-5396-03 Controller Unit is a key control module applied in TEL semiconductor equipment, mainly used to execute process flow logic, coordinate management subsystems, collect equipment operating status, and achieve linkage control with the upper system or human-machine interface through communication interfaces.

This controller unit is often integrated into the main control platform of TEL's etching (Etch), thin film deposition (CVD/ALD), cleaning (Wet Bench), handling system (EFEM) and other equipment, with high reliability, high anti-interference ability and industrial grade control performance.

1、 Basic Information

Product model: 370-5396-03

Product Name: Controller Unit

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: Industrial Control Processing Unit (IPC or Embedded System)

Integration method: Modular control architecture (such as E244 system or independent control cabinet)

2、 Core functions

Process control

Execute preset equipment flow logic, such as gas injection sequence, temperature control, chamber vacuum, wafer handling instructions, etc;

Works in conjunction with process modules such as gas circuits, temperature control, and power supply units.

Input/Output Management

Manage multiple I/O modules (such as digital input/output, analog acquisition, etc.);

Collect device status information (sensor signals, door lock status, air valve action, etc.).

Communication coordination

Provide communication interfaces with the upper computer (such as MES system) or other control boards within TEL (such as BX81, E249, etc.);

Supports Ethernet RS232、 Multiple communication methods such as backplane bus.

Real time data processing and alarm

Real time processing of operational data, analysis of abnormal states, output of alarms or interlock protection;

Provide interface and HMI panel connection for operation display and data interaction.

Product imag

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