TEL Tokyo Electron 2L81-000011-11 Interface Module

TEL Tokyo Electron 2L81-000011-11 Interface Module

Product Details Introduction

Product model: TEL Tokyo Electron 2L81-000011-11

Product type: Interface Module

Application object: Control and Communication Interface Subsystem in Tokyo Electron Semiconductor Equipment System

1、 Product Function Description:

The 2L81-000011-11 interface module is an electronic interface module developed by Tokyo Electron specifically for its wafer processing and process equipment. It is mainly used to achieve signal conversion, communication relay, and logic control between the main control system and various equipment subsystems, and is suitable for high-precision and high reliability industrial control scenarios.

2、 Main application areas:

Semiconductor manufacturing equipment control system

Installed in the core equipment of Tokyo Electron (such as CVD, Etcher, PVD, etc.), it is used for signal communication between the main control board and the executing components (valves, motors, sensors).

I/O signal relay and transfer

Responsible for the unified access and forwarding of digital input/output (DI/DO), analog input/output (AI/AO) and other signals within the equipment, achieving a modular control architecture.

Communication management between devices

In a distributed system architecture, it is used for signal synchronization and data communication between different control subsystems, such as the interface between wafer processing units and vacuum control units.

Motion Control and Position Feedback System

Suitable for control and signal feedback loops of motion units such as wafer transfer systems, alignment platforms, and robotic arms.

Interface of cleanroom automation equipment

An automated device that can be integrated into a clean environment to ensure accurate transmission of control signals under interference free and high stability conditions.

Equipment maintenance and status monitoring

Collect device operating parameters and diagnostic information through interface modules to achieve remote monitoring and maintenance functions.

Product imag

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