KLA Tencor 0348368-002 Combination Interface Board

KLA Tencor 0348368-002 Combination Interface Board

Product Details Introduction

The KLA Tencor 0348368-002 Combo Interface Board is a circuit board specifically designed for signal integration and connection functions in semiconductor manufacturing equipment. According to the company's product architecture and the purpose of similar interface modules, its main product application areas are as follows:

1、 Product Function Overview

The 0348368-002 interface board has multiple electrical interface standards, which are used to establish data communication, control signals, analog/digital input and output channels between different functional modules inside the device. Commonly used to connect the following components:

Laser/Optical Detection System

Electron beam scanning module

Signal Processing Unit

Scan platform controller

Probe control module

2、 Typical application areas

Wafer defect detection system

In KLA's Surfscan series, eSxx series, and 236x series, the interface board is used to connect the scanning platform with the defect recognition processing system, achieving synchronous control and image data transmission.

CD-SEM morphology measurement system

Used to achieve high-speed communication between the electronic beam scanning probe controller and the host data processing system, assisting in precise measurement functions such as line width and edge roughness.

Automated Shadow Detection Equipment

In the post lithography detection system, the interface board serves as a control and feedback bridge for light source control, reflection acquisition, and mobile platform positioning system.

Wafer transfer and loading unit

During the process of wafer loading, calibration, and alignment, the interface board controls various sensors and actuators to achieve automatic handling and status detection.

Multi functional detection/analysis platform

A system architecture that adapts to multiple sensor inputs and multiple signal outputs, supporting high-precision and multi-channel parallel processing requirements.

Product imag

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