Brooks Automation 017-0266-01 Wafer Handling Robot

Brooks Automation 017-0266-01 Wafer Handling Robot 

 Introduction

Colleagues who do semiconductor EFEM front-end maintenance often come into contact with the Brooks Automation 017-0266-01 wafer handling robot. This is a Brooks Reliance series atmospheric robotic arm used for transferring wafers between FOUPs and pre alignment stages, and is the core transmission component of the equipment's front-end module.

Product Features

1. Excellent repeat positioning accuracy, stable wafer placement position, and reduced fragment risk

2. Clean grade mechanical structure with low particle production during movement, meeting the standards of dust-free workshops

3. The servo drive runs smoothly, with minimal vibration during high-speed handling, protecting the surface of the wafer

4. Built in collision detection, will immediately stop when encountering foreign objects, protecting the arm and wafer

5. Native adaptation of machine control system, smooth communication, easy on-site disassembly and replacement

Product Specifications

1. Compatible with wafer size 200mm

2. Multi axis servo linkage, supporting composite actions of rotation, expansion, and contraction

3. The cleanliness level meets the requirement of dust-free semiconductor front-end

4. Built in position encoder, real-time feedback of arm coordinates

5. Support receiving machine handling instructions and sending back alarm signals

Application Areas

1. Semiconductor EFEM equipment wafer box and pre alignment table for loading and unloading

2. Automatic front-end transmission of wafer inspection equipment

3. Front end wafer feeding for etching and deposition equipment

4. Wafer handling and transfer in FOUP wafer box

5. Brooks Reliance mechanical arm spare parts maintenance and replacement

Overall, the Brooks Automation 017-0266-01 wafer handling robot has stable movements and good particle control, and is commonly used for replacing faulty EFEM front-end robotic arms on the 200mm production line.

Product imag

ontroller Module

1C31233G01 Analog input module
5X00058G01 analog output module
5X00070G01 Analog input module

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