Newport 35-3700-1425-18 Wafer Handling Robot

Newport 35-3700-1425-18 Wafer Handling Robot 

 Introduction

Colleagues who perform front-end maintenance of AMAT equipment often use the Newport 35-3700-1425-18 wafer handling robot (Kensington multi link manipulator), which is compatible with 300mm wafer EFEM units and is responsible for transferring wafers between FOUP and pre alignment stages and process chambers. It is the core moving component of AMAT equipment front-end transmission.

Product Features

1. Multi link servo structure, smooth high-speed telescopic rotation action, high repeat positioning accuracy, reducing fragment risk

2. Clean grade mechanical design, excellent particle control during the movement process, meeting the 300mm dust-free workshop standard

3. Built in collision detection, will immediately stop when encountering foreign objects, protecting the wafer and arm body

4. Closed loop position feedback, real-time feedback of arm coordinates, ensuring consistent placement and retrieval positions every time

5. Original interface, compatible with AMAT machine control system communication, saving time and effort for on-site disassembly and replacement

Product Specifications

1. Compatible with wafer size of 300mm

2. Multi axis linkage, rotation+telescopic composite motion

3. Clean grade vacuum end picking up wafers

4. Built in absolute position encoder

5. Support sending and receiving instructions and uploading alarm information with the device controller

Application Areas

1. AMAT Semiconductor Equipment EFEM Front End Wafer Loading and Unloading

2.300mm wafer box FOUP to pre alignment table for wafer feeding

3. Front end module wafer transfer for etching and deposition equipment

4. Automatic wafer feeding unit for wafer inspection equipment

5. Repair and replacement of spare parts for Newport Kensington robotic arm

Overall, the Newport 35-3700-1425-18 wafer handling robot is a commonly used multi link robotic arm for EFEM on 300mm production lines, with stable and reliable wafer retrieval. It is also frequently used for replacing front-end handling failures.

Product imag

ontroller Module

RELIANCE 0-60063-1 60063-1 module
MVME-147A Control card
YOKOGAWA NFAI143-H00 Logic module

Other website links

SYN5202-0271 信号处理板
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VMIVME-7740-840 350-07740-840-M 处理器模块