AMAT 0010-09237 CVD Lamp Module Component

AMAT 0010-09237 CVD Lamp Module Component 

 Introduction

AMAT 0010-09237 CVD Lamp Module Component

Product Features:

1. The stable output of the infrared light source provides a fast and uniform wafer heating source for the CVD chamber

2. Equipped with aging monitoring of the light source, the brightness attenuation can be recognized by the machine, and the replacement cycle can be alerted in advance

3. Integrated heat dissipation structure, control module temperature rise under long-term high temperature operation, extend lamp life

4. Standardized module packaging, on-site direct insertion and replacement without disassembling the internal structure of the cavity

5. Anti process gas corrosion shell, suitable for the process environment of P5000 series CVD chamber

Product Parameters:

1. Material model: 0010-09237

2. Light source type: infrared heating lamp group

3. Compatible with wafers: 200mm (8 inches)

4. Power supply specification: AC power supply

5. Compatible equipment: AMAT P5000 CVD thin film deposition machine

Application fields:

1. Infrared heating of semiconductor CVD thin film deposition wafers

2. Temperature control of polycrystalline silicon and silicon oxide thin film deposition process

3. Preheating the wafer temperature to shorten the waiting time of the cavity process

4. Construction of uniform thermal field for wafers inside the vacuum deposition chamber

5. Replacement and maintenance of spare parts for AMAT P5000 CVD equipment lamp group

This AMAT 0010-09237 CVD lamp module component is the infrared heating core module of P5000 CVD machine, which relies on infrared radiation to quickly heat up the wafer and ensure the uniformity of thin film deposition

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