Edwards A71003908XS Vortex Vacuum Pump

Edwards A71003908XS Vortex Vacuum Pump 

 Introduction

Most colleagues who do semiconductor rough pumping maintenance are familiar with the Edwards A71003908XS vortex vacuum pump. This is an Edwards dry vortex pump, which belongs to the oil-free rough pumping pump and provides pre vacuum pumping for molecular pumps. It is a basic pump body spare part for semiconductor vacuum units.

Product Features

1. Dry oil-free structure, no risk of oil contamination, no oil return to the chamber, ensuring a clean vacuum environment

2. The vortex dynamic and static disks are precisely engaged, with stable pumping speed, quickly pumping the chamber from atmospheric pressure to the coarse vacuum range

3. Built in multiple protections, automatic shutdown for overload, overheating, and abnormal pressure, protecting the scroll from damage

4. Low vibration and low noise design, stable long-term continuous operation, suitable for dust-free workshop working conditions

5. The original pipeline and electrical interface are easy to disassemble and assemble on site, reducing the downtime and maintenance time of the production line

Product Specifications

1. Pump type: Dry vortex vacuum pump

2. The ultimate vacuum can reach 0.1mbar

3. Air cooled cooling with built-in temperature monitoring

4. Built in pressure sensor, feedback vacuum status to the machine

5. Adapt to the pre rough drawing conditions of semiconductor processes

Application Areas

1. Pre rough drawing of semiconductor vacuum chamber

2. Turbomolecular pump with pre stage vacuum supply

3. Vacuum unit matching for wafer etching equipment

4. Coarse vacuum unit of thin film deposition equipment

5. Edwards vortex pump spare parts maintenance and replacement

Overall, the Edwards A71003908XS vortex vacuum pump is oil-free, clean, and reliable in operation. It is often selected for replacement of molecular pump front-end pump faults.

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