ENI 0190-07963 Generator blades

ENI 0190-07963 Generator blades 

 Introduction

Colleagues who maintain ENI RF generators often use ENI 0190-07963 generator blades. These are internal cooling blades of the RF power supply, installed on the fan of the RF generator, responsible for forced air cooling and heat dissipation of power devices. They are spare parts for the internal cooling system of the RF power supply.

Product Features

1. The blade has high dynamic balance accuracy, low high-speed rotation vibration, and reduces machine noise and resonance

2. Made of heat-resistant engineering plastic material, it is not easily deformed or cracked under long-term high temperature conditions, and has a stable service life

3. Streamlined blade design, high air volume and good heat dissipation effect, taking away the heat generated by the power tube

4. Original specifications, perfectly matched with the fan shaft, can be replaced directly on site without the need for dynamic balancing and debugging

5. It is not easy to produce particles and meets the requirements for use in semiconductor clean rooms

Product Specifications

1. Compatible with ENI series RF generator cooling fan

2. Integrated injection molded fan blade structure

3. Adapt to high-speed rotation conditions of the fan

4. High temperature resistance, long-term operation without softening or deformation

5. The installation method is fixed with a shaft sleeve

Application Areas

1. Internal cooling fan component of ENI RF generator

2. RF power supply heat dissipation unit for semiconductor etching equipment

3. Cooling matching for RF power module of plasma equipment

4. Temperature control and heat dissipation of RF generator power components

5. Repair and replacement of spare parts for ENI RF power supply

Overall, ENI 0190-07963 generator blades are the core components for RF power supply cooling, ensuring continuous cooling of the RF host. Replacement of fan blades is commonly used when they age and become damaged.

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