ACT 796-0099223-001 Turbomolecular Pump Controller

ACT 796-0099223-001 Turbomolecular Pump Controller 

 Introduction

Colleagues who maintain vacuum equipment often use the ACT 796-0099223-001 Turbomolecular Pump Controller. This controller is used to drive the turbo molecular pump, control the start stop, speed, and emptying process of the pump body, and is the core driving spare part of semiconductor vacuum systems.

Product Features

1. The speed closed-loop control is stable and can smoothly complete the entire process of speed increase, stability, and decrease, protecting the pump bearings

2. Built in multiple protections, overheating, overload, and rotor abnormalities will trigger shutdown protection

3. Equipped with a vent valve control logic, it automatically performs inflation during shutdown to prevent damage to the pump core caused by oil return

4. Native compatibility with matching molecular pumps, communication docking with machine control, easy and fast on-site replacement

5. Comes with built-in operation log records, making it convenient for maintenance personnel to retrieve historical alarms and quickly troubleshoot faults

Product Specifications

1. Adapt to the corresponding series of turbo molecular pump drivers

2. Support real-time speed acquisition and closed-loop speed regulation

3. Power supply AC100~240V wide voltage input

4. Support digital I/O and serial communication, and feedback pump status

5. Working environment 5 ℃~40 ℃, suitable for dust-free workshops

Application Areas

1. High vacuum molecular pump drive control for semiconductor equipment

2. Etching and deposition chamber vacuum unit control

3. Vacuum system matching for wafer cleaning equipment

4. Start stop control of laboratory vacuum equipment turbo pump

5. Maintenance and replacement of spare parts for turbo molecular pump controller

Overall, ACT 796-0099223-001 turbomolecular pump controller has stable speed regulation, complete protection mechanism, and is commonly used for replacing vacuum unit controller faults.

Product imag

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