Richardson Electronics 27-380115-00 RF Matcher

Richardson Electronics 27-380115-00 RF Matcher 

 Introduction

Colleagues who do semiconductor RF maintenance often come across Richardson Electronics 27-380115-00 RF matching device, which is used for automatic impedance adjustment, reducing RF reflection power, stabilizing plasma state, and is the core spare part of semiconductor etching cavity RF circuit.

Product Features

1. The automatic tuning response is fast, and impedance matching is quickly completed when the plasma load changes

2. Built in power monitoring, real-time collection of reflected power, timely warning of abnormal working conditions

3. Integrated multiple protections, triggered by overheating and high reflection power, to protect the RF generator

4. Strong anti electromagnetic interference performance, suitable for complex electromagnetic environments in semiconductor workshops

5. Original standard interface, smooth communication with matching RF power supply, easy on-site disassembly and replacement

Product Specifications

1. Operating frequency 13.56MHz

2. Compatible with a maximum RF power of 2500W

3. Standard characteristic impedance 50 Ω

4. Power supply 24VDC

5. Support digital communication, return matching location and fault alarm information

Application Areas

1. Radio frequency impedance matching in semiconductor wafer dry etching process

2. RF matching for plasma thin film deposition chamber

3. Plasma surface cleaning process for wafers

4. RF circuit adjustment of plasma processing equipment

5. Maintenance and replacement of spare parts for RF matching devices in semiconductor equipment

Overall, Richardson Electronics 27-380115-00 RF matching device has fast tuning speed, good reflection power suppression effect, and is commonly used for replacing RF system faults in etching equipment

Product imag

ontroller Module

1C31201G01 Analog input module
1C31227G02 analog output module
1C31233G01 Analog input module

Other website links

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