ENI OEM-6B-01M3 RF Generator

ENI OEM-6B-01M3 RF Generator 

 Introduction

ENI OEM-6B-01M3 RF generator, a commonly used solid-state RF power supply in semiconductor plasma processes, with stable output.

Product Features:

1. Solid state RF circuit with stable power output and good process consistency

2. Equipped with power reflection protection, it quickly protects the host in case of abnormal load

3. Compact rack structure, cabinet installation does not take up extra space

4. Support communication signal feedback, convenient for the upper computer to monitor the status

5. Strong anti-interference ability, reliable and continuous operation of the production line for a long time

Product Parameters:

1. Model: OEM-6B-01M3

2. Operating frequency: 13.56MHz

3. Rated output power: 650W

4. Input power supply: 208V single-phase AC

5. Communication interface: RS232

Application fields:

1. Plasma power supply for semiconductor etching process

2. RF source for thin film deposition equipment

3. Wafer plasma cleaning equipment

4. Material surface modification equipment

5. Replacement of RF power supply spare parts for old semiconductor machines

Plasma process equipment maintenance and replacement, ENI OEM-6B-01M3 RF generator has good compatibility

Product imag

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