Shimadzu 3Z80-000025-V1 Turbomolecular Pump Controller

Shimadzu 3Z80-000025-V1 Turbomolecular Pump Controller

 Introduction

#Shimadzu 3Z80-000025-V1 Turbomolecular Pump Controller Product Features

Shimadzu 3Z80-000025-V1 is a specialized molecular pump drive controller for semiconductor machines, which controls the start stop, speed regulation, and status monitoring of turbo molecular pumps.

1. Provide stable driving output and control the high-speed operation of the molecular pump

2. Support the complete process control of pump acceleration, constant speed, and braking

3. Speed closed-loop regulation ensures smooth operation of the speed

4. Equipped with multiple protections for overcurrent, overvoltage, overheating, and overload

5. Local start stop, also supports remote signal control of the machine

6. Shimadzu 3Z80-000025-V1 supports serial communication and uploads pump operation data

7. Real time collection of operating parameters such as speed, temperature, and current

8. Fault code prompt, convenient for quickly troubleshooting pump body abnormalities

9. Regenerative braking function, reducing downtime and deceleration time

10. Board type structure, convenient disassembly and replacement of cabinet slots

11. Electrical isolation to resist electromagnetic interference inside the cabinet

12. Compatible with Shimadzu original turbo molecular pump, with good overall compatibility

13. Wide temperature adaptability, able to withstand the internal working conditions of equipment cabinets

14. Power on self-test, automatic hardware status detection upon power on

15. Suitable for long-term uninterrupted production line continuous operation

Shimadzu 3Z80-000025-V1 has stable driving and is commonly used in semiconductor etching and deposition vacuum equipment.

Product imag

ontroller Module

140DDO84300 Digital module
BENTLY 123M4610 cable
CAMERON AAP3798102-00037 Touch screen

Other website links

140DDO84300 Digital module
BENTLY 123M4610 cable
CAMERON AAP3798102-00037 Touch screen