AMAT 0190-77528 servo motor

AMAT 0190-77528 servo motor

 Introduction

AMAT 0190-77528 servo motor

1. Application Material Semiconductor Equipment Dedicated Servo Motor

2. High precision position closed-loop, micrometer level positioning control

3. Built in high-precision encoder, feedback speed and position signal

4. Fast response speed, suitable for wafer mechanism reciprocating motion

5. Comes with overheating and overload hardware protection functions

6. Suitable for clean environment use of semiconductor process equipment

7. Smooth torque output, low vibration and noise during operation

8. Aviation plug interface, stable wiring and anti-interference

9. Support closed-loop control of the driver to achieve precise motion

10. Compact body, saving installation space inside the device

11. Industrial grade winding, capable of withstanding temperature changes in equipment cabinets

12. Resistant to vibration and impact, suitable for long-term continuous operation of equipment

13. Optional version with brake, power off locking shaft position

14. Protection level adapted to internal working conditions of semiconductor equipment

15. Compatible with AMAT series thin film and etching process equipment

AMAT 0190-77528 servo motors are motion executing components for semiconductor equipment, commonly used in wafer transfer and process chamber motion driving scenarios.

Product imag

ontroller Module

CP450T-ETH 1SBP260189R1001 Touch screen
DS200ADPBG1 Gas turbine module
DS200KLDBG1ABC DS215KLDBG1AZZ03A Gas turbine card

Other website links

 DCS500 SDCS-POW-1C电源模块
TRICONEX 3700A安全控制器
TRICONEX 3624可编程的安全控制器