RENISHAW RLD10-X3-DI Fiber Laser Encoder

RENISHAW RLD10-X3-DI Fiber Laser Encoder

 Introduction

RENISHAW RLD10-X3-DI Fiber Laser Encoder

1. RENISHAW RLD10-X3-DI adopts differential interference detection method, which can accurately detect the relative displacement of two sets of mirrors

2. The measurement accuracy is extremely high, with a maximum resolution of 38.6pm, and the positioning data is precise and stable

3. The laser is transmitted through optical fibers, and the light source and detection head are arranged separately, with flexible wiring and installation

4. Equipped with four built-in beam fine-tuning structures, the angle of the optical path can be calibrated outside the cavity

5. The three pin positioning installation structure, after disassembly and reassembly, will not disrupt the original optical path

6. Can offset common mode errors caused by cavity deformation and temperature fluctuations, and has strong resistance to environmental interference

7. Adapt to the working conditions of vacuum chambers and achieve non-contact measurement inside the chamber with optical windows

8. Excellent laser frequency stability performance, small wavelength drift during long-term operation, and good measurement consistency

9. Built in safety interlock, automatically shuts down laser output when fiber or line is disconnected, high safety

10. The periodic error value is very low, and there will be no significant deviation in position feedback under high-speed motion

11. Suitable for straight-line measurement with a maximum travel of 1 meter, meeting the mobile detection requirements of semiconductor precision platforms

12. High quality coating on optical components, low beam loss, and stable signal acquisition in low light environments

13. Compact body structure, fixed on the outside of the cavity, will not occupy the internal space of the vacuum chamber

14. The seismic resistant structure is stable, and the light path is not easily displaced or misaligned when the equipment continues to vibrate

15. Supporting standard orthogonal signal output, can be directly connected to industrial control motion control systems

RENISHAW RLD10-X3-DI is commonly used for high-precision closed-loop positioning and inspection of semiconductor wafer platforms and vacuum equipment.

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