Introduction
DAIHEN SVD-002-X0834 aligner
1. Adapt semiconductor EFEM wafer transfer system to achieve precise positioning of wafer notches and flat edges
2. SVD-002-X0834 is equipped with an optical detection unit for high-speed recognition of wafer edge features
3. High precision in angle repetition positioning ensures consistency in wafer picking by the robotic arm
4. Clean grade mechanical structure, low dust emission, meets ISO cleanliness standards for cleanrooms
5. SVD-002-X0834 has a built-in servo drive, ensuring smooth alignment and reducing the risk of wafer damage
6. Standard communication interface, capable of real-time transmission of alignment status signals with the machine master control
7. Built in multiple hardware protections, automatic shutdown warning in case of abnormal material jamming
8. Optical lens anti dust coating reduces particle adhesion and maintains recognition stability
9. SVD-002-X0834 has excellent seismic performance and is suitable for continuous operation of automated production lines
10. Support multiple specifications of wafer adaptation, convenient program switching
11. Modular assembly structure, easy on-site disassembly and maintenance, reducing downtime
12. SVD-002-X0834 signal filtering optimization to resist electromagnetic interference in RF environment
13. The whole machine has completed optical calibration and power on aging screening before leaving the factory
14. Compact body design, saving installation space inside the device
15. Following DAIHEN's original factory specifications, spare parts of the same model SVD-002-X0834 can be directly exchanged
The DAIHEN SVD-002-X0834 aligner is a core positioning component of wafer transfer equipment, used for pre alignment of semiconductor machine wafers and is a commonly used maintenance spare part for automated production lines.
Product imag

ontroller Module
BACHMANN MPC270-128512M Digital input module
MVME2100 controller card
PFSK152 3BSE018877R1 pulse output card
Other website links
MOTOROLA MVME-5100 伺服驱动模块
MOTOROLA MVME2100 隔离放大模块
Motorola IPMC761 控制模块
| AMAT 0090-02233 | AMAT 0190-35512 | AMAT 0190-20132 |
| AMAT 0100-01396 | AMAT 0190-35515 | AMAT 0190-20140 |
| AMAT 0100-20458 | AMAT 0190-35519 | AMAT 0190-20142 |
| AMAT 0100-11002 | AMAT 0190-35522 | AMAT 0190-20148 |
| AMAT 0100-02879 | AMAT 0190-35602 | AMAT 0190-20168 |
| AMAT 0100-00010 | AMAT 0190-35606 | AMAT 0190-21051 |
| AMAT 0240-A2521 | AMAT 0190-35607 | AMAT 0190-21111 |