Gasonics A90-029-03 Lift Plate

Gasonics A90-029-03 Lift Plate

Product Details Introduction

Product Name: Gasonics A90-029-03 Lift Plate

Component type: Wafer Lift Plate

Main function: Used for vertical lifting and lowering of wafers in plasma processing equipment, for handling, docking, and switching of processing positions

1、 Wafer processing module in plasma cleaning equipment

The Gasonics A90-029-03 lift plate is part of the internal wafer handling mechanism of Gasonics systems (such as Aura series, L3500, etc.), responsible for providing support when the wafer moves up and down from the load lock or processing chamber.

Typical use:

Raise or lower the wafer from the transfer position to complete loading/unloading

Accurately positioning the wafer height in the processing chamber to ensure process uniformity

Cooperate with the elevator mechanism to complete the wafer docking action

2、 Load Lock module with lifting structure

The lifting plate is usually installed at the end of the Load Lock lifting mechanism and serves as a direct contact platform between the wafer and the lifting motor.

Collaborative components:

Stepper motor driver (such as RD-323M10)

Elevator lifting guide rail system

Wafer tray or vacuum adsorption platform

3、 Positioning mechanism in wafer loading and unloading process

The lifting plate is used in the wafer handling process to achieve precise height switching between different process nodes, which helps to improve processing efficiency and prevent wafer scratches.

Specific application:

The loading platform lifts the wafer to the height of the processing chamber entrance

After the process is completed, lower the wafer to the output tray docking position

Inter layer switching in a multi-layer wafer workstation system

Product imag

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