Gasonics 94-2806 Robot Arm Module

Gasonics 94-2806 Robot Arm Module

Product Details Introduction

1、 Product Overview

Gasonics 94-2806 is a robotic arm module used in Gasonics plasma processing equipment, mainly for automatic handling and alignment of wafers or workpieces inside the equipment. This module integrates mechanical structures, drive components (such as servo motors), sensor systems, and interfaces with the main control system, enabling high-precision wafer loading and unloading, rotation, and transfer in vacuum or clean room environments. It is one of the key components for achieving fully automated operation.

2、 Application Fields

1. Plasma stripping/cleaning equipment

Used for automatic handling of wafers between the main processing chamber and the load lock;

Reduce human intervention, improve system productivity and cleanliness.

2. Front wafer processing equipment

Transport wafers before and after photolithography, etching, deposition, and other processes to ensure seamless integration;

Can be paired with Gasonics Aura, PEP series and other equipment.

3. Automation of semiconductor packaging testing

Capture and accurately place bare or packaged chips from the carrier onto the testing platform;

Improve operational accuracy, reduce errors and loss rates.

4. Research and process development platform

Suitable for situations where high cleanliness is required in R&D systems such as universities and research institutions;

Realize automatic transfer of samples under different experimental conditions.

Product imag

Related website links

CI871AK01 3BSE092693R1 interface module

VE5010 Logic Controller Module

KJ3222X1-BA1 Analog Input Module

Other website links

MOTOROLA MVME761-001自动化控制模块

BENTLY 350022M 138607-01系统模块卡件

ABB 1TGE120021R0610 HW3 通信模块