Gasonics C12101 RMS-0069 Transformer

Gasonics C12101 RMS-0069 Transformer

Product Details Introduction

1、 Product Overview

Gasonics C12101 (also known as RMS-0069) is a power transformer module used in Gasonics plasma processing equipment. Its main function is to convert the input power voltage into multiple stable operating voltages required by the equipment. It is commonly used to drive key units such as control systems, RF modules, vacuum components, sensors, etc. This transformer is designed to meet industrial grade isolation and withstand voltage requirements, and is suitable for long-term operating environments.

2、 Application Fields

1. Plasma cleaning and stripping equipment (such as Gasonics Aura/PEP series)

Provide voltage conversion for the main control system, power drive module, air circuit control board, etc;

Provide stable AC or DC output to support the operation of core functional units.

2. RF power supply system

Provide isolated power supply to the RF generator to ensure stable plasma excitation;

Reduce the impact of radio frequency interference on other systems.

3. Load lock and robot control system

Supply power to actuating components such as solenoid valves and motor control boards;

Implement automated control and interlocking operation of the wafer loading process.

Product imag

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