Gasonics A89-013-01 Interface Control Panel

Gasonics A89-013-01 Interface Control Panel

Product Details Introduction

1、 Product Overview

Gasonics A89-013-01 is an Interface Control Panel used in Gasonics plasma equipment (such as Aura, PEP series) for integrating equipment operation, status display, signal interaction, and local control functions. This panel generally integrates physical buttons, indicator lights, communication interfaces, and display modules, serving as a human-machine interaction interface between the device and the user or maintenance engineer, playing an important role in coordinating system functions and executing operational commands.

2、 Application Fields

1. Plasma treatment system (Plasma Asher/Cleaner)

Local control of key subsystems such as RF power supply, vacuum chamber, lifting platform, gas flow rate, etc;

Display device operating status, alarm prompts, process flow information, etc.

2. Load lock and handling platform

Provide manual control and interlock release buttons for easy maintenance and debugging;

Connect to the main control board to achieve IO status feedback and command issuance.

3. Security interlock and system testing interface

Includes emergency stop (EMO), door lock control, start/reset buttons, etc;

Suitable for manual control operations during equipment debugging, testing, and troubleshooting phases.

Product imag

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