Gasonics 16383-01 16384-01 Interlock Driver

Gasonics 16383-01 16384-01 Interlock Driver

Product Details Introduction

1、 Product Overview

Gasonics 16383-01 and 16384-01 are specialized interlock driver modules used in Gasonics plasma processing equipment such as Aura and PEP series. Its main function is to control and execute the interlocking logic between various subsystems of the equipment, such as the opening and closing status linkage of safety doors, gas circuits, power supplies, vacuum chambers, etc., to ensure personnel safety and process integrity during equipment operation.

2、 Application Fields

1. Plasma cleaning and stripping equipment

Control the interlocking status of key components such as door locks, vacuum status, RF power supply, etc;

For example, it is prohibited to turn on the RF power when the cavity is not evacuated, or to operate the lifting platform when the door is not closed.

2. Load lock system and automatic handling platform

Linkage with wafer handling robots to ensure the correct operation sequence of each component in the wafer loading process;

Avoid wafer damage or equipment misoperation.

3. Process safety control system

Realize automatic cut-off and alarm for abnormalities in gas flow rate, voltage status, etc;

As part of the overall interlocking logic of the equipment, perform physical layer control.

Product imag

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