Gasonics A95-104-03 Elevator Module

Gasonics A95-104-03 Elevator Module

Product Details Introduction

1、 Product Overview

Gasonics A95-104-03 is one of the key executing components in Gasonics plasma processing equipment, belonging to the Lift Mechanism Module. Its main function is to drive the wafer platform (such as wafer tray) to perform vertical lifting and lowering movements in the process chamber or load lock chamber, in order to achieve precise wafer loading and unloading, position alignment, or coordinated operation with robot arms. This module typically includes electric or pneumatic drive mechanisms, guide rails, limit switches, and position feedback systems.

2、 Application Fields

1. Plasma stripping/cleaning equipment (such as Gasonics Aura/PEP series)

Control the lifting and lowering of the wafer in the reaction chamber, in conjunction with the flow of gas and the rhythm of plasma processing;

Complete wafer loading and unloading in a vacuum environment.

2. Load lock chamber system

Realize vertical handling coordination between wafers from Loadlock to processing chambers;

Linkage with vacuum doors and robotic arms to enhance automation level.

3. Positioning/Alignment Mechanism of Process Processing Platform

Provide precise Z-axis adjustment to ensure stable spacing between the wafer and electrodes or nozzles;

Suitable for multiple process steps such as surface treatment, etching, ashing, etc.

Product imag

Related website links

GE 201CI-1 Controller Module

Bentley 330980-50-05 proximity sensor

SANYO P30B0601DXS8SM servo motor

Other website links

IS200EPSMG1ABB励磁电源模块

ABB PL810P 3BDH000311R0101 电源链接模块

ABB T3N225 断路器