Gasonics SRW-200-4003 power module

Gasonics SRW-200-4003 power module

Product Details Introduction

1、 Product Overview

Gasonics SRW-200-4003 is a power supply module designed specifically for Gasonics plasma processing equipment. Its main function is to provide stable and precise power output for key components in the equipment, such as RF power amplifiers, vacuum pump control units, PLC modules, robot drives, etc. This module has high reliability and anti-interference ability, suitable for semiconductor manufacturing applications with strict requirements for high cleanliness and electromagnetic environment.

2、 Application Fields

1. Plasma cleaning and stripping equipment (such as Gasonics Aura/PEP series)

Provide stable power for RF generators and plasma source control units;

Ensure uniform and stable generation of plasma inside the cavity.

2. Automated handling system

Provide power to internal robotic arms, elevators, solenoid valves, and other actuators;

Support power supply requirements for multi axis synchronous control.

3. Load lock control system

Provide isolated power supply for vacuum pumps, valve controllers, and door lock systems;

Ensure the coordinated operation of equipment during airtightness and process conversion.

4. Embedded control and monitoring module

Support low-voltage electrical loads such as the main control system, touch screen HMI, and electrical interface board of the device;

Equipped with overvoltage and overcurrent protection functions.

Product imag

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