Gasonics 97-0197 Control Motherboard

Gasonics 97-0197 Control Motherboard

Product Details Introduction

1、 Product Overview

Gasonics 97-0197 is a control board used for core control in Gasonics plasma equipment (such as Aura and PEP series). This motherboard serves as the brain of the entire machine, responsible for coordinating and managing the operation and communication of all key subsystems within the device, such as RF power supply, gas control, lifting platform, robot arm, etc. It integrates multiple I/O interfaces, processor modules, and communication buses (such as CAN, RS-232/422, I ² C, etc.), supporting real-time data processing and hardware linkage control.

2、 Application Fields

1. Plasma stripping and cleaning system (such as Gasonics Aura 3010/PEP 3510 series)

Control the overall process logic, such as vacuum control, RF power control, process timing, etc;

Implement instruction interaction with user HMI interface or upper computer software.

2. Automatic handling and load locking subsystem

Coordinate the movements of modules such as elevators and wafer handling arms;

Realize the precise linkage process of wafer loading and unloading.

3. Process control and gas flow management system

Read sensor data and control components such as mass flow meters, solenoid valves, vacuum valves, etc;

Ensure precise control of various process gases.

Product imag

Related website links

SANYO P30B0601DXS8SM servo motor

ADLINK CPS-H325/24 power module

ASEA YM316001-NL Double Plate Component

Other website links

ABB T3N225 断路器

ABB 3BHE023784 控制器模块

KOLLMORGEN 60WKS-CE240 22PB 伺服驱动器