Gasonics A06261 Endpoint Detector

Gasonics A06261 Endpoint Detector

Product Details Introduction

1、 Product Overview

Gasonics A06261 is a specialized endpoint detector in Gasonics plasma processing equipment, used to monitor changes in plasma reaction status in real-time during the process, accurately determine the process "endpoint" (i.e. the time point of reaction completion), and ensure consistency and process repeatability in the processing of each wafer. Such detectors often use the Optical Emission Spectroscopy (OES) principle, which can sense specific spectral line intensity changes in plasma.

2、 Application Fields

1. Plasma Ashers equipment

Real time monitoring of photoresist removal process, determining whether the treatment is completed by detecting changes in specific gases or residues;

Avoid over peeling or under peeling to improve product yield.

2. Plasma etching equipment

Used to detect etching endpoints, such as changes in interfaces between different materials;

Support precise layer control for multi-layer structures.

3. Semiconductor wafer manufacturing production line

Integrated into wafer cleaning, surface treatment and other process stages to ensure stable process windows;

Improve the consistency and automation level of mass production.

Product imag

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