Gasonics 73-0068 Elevator Alignment Tool

Gasonics 73-0068 Elevator Alignment Tool

Product Details Introduction

Gasonics 73-0068 Elevator Alignment Tool

Brief introduction

Name: Elevator Alignment Tool

Part number: 73-0068

Applicable models: Gasonics plasma processing equipment (such as A-2000, Aura, PEP series)

Purpose: Used for mechanical alignment and position correction of elevator platforms in load lock chambers or process chambers

Equipment Type: Specialized Calibration/Maintenance Assistance Tool

2、 Functional purpose

This tool is used to ensure that the elevator lifting platform is in a precise vertical travel and horizontal positioning state before or after equipment operation or maintenance, ensuring that the alignment accuracy between the wafer and the transfer robotic arm meets the standard, and avoiding:

Wafer transfer failure

Platform and robotic arm interference

Wafer placement offset or fragmentation

The cavity door cannot be closed correctly

Product imag

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