Gasonics 04290-201 Load Lock Elevator

Gasonics 04290-201 Load Lock Elevator

Product Details Introduction

1、 Component Introduction

Name: Load Lock Elevator

Part number: 04290-201

Applicable equipment: Gasonics A-2000/A-2000LL/Aura series plasma stripping machine

Function type: Wafer Loadlock lifting mechanism component

2、 Main functions

This module is a vertical lifting actuator installed in the Loadlock chamber, used for:

Wafer Boat, Wafer Plate

During the loading and unloading process, move the wafer from the Transfer Robot interface position to the processing position or vice versa

Cooperate with pressure, vacuum, and position sensors to achieve precise positioning and automated operation

3、 Core technical characteristics

Parameter description

Most driving methods use stepper motor drive or servo motor+screw structure

The lifting stroke is generally 100mm~300mm, designed according to the height of the cavity

Position control with upper and lower limit sensors, supporting precise stop in the center position

Interface control is linked with the main controller (such as A90-003-01) or Elevator Driver module

Load capacity supports single or whole wafer tray lifting (6 "/8" compatible)

4、 Typical Composition

Elevator platform (with tray support)

Lift screw/slide rail system

Stepper/servo motor

Optoelectronic or contact limit sensor

Control cable and encoder feedback (partial versions)

Product imag

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