Gasonics A90-003-01 A89-003-01 Control Module

Gasonics A90-003-01 A89-003-01 Control Module

Product Details Introduction

1、 Product Overview

Gasonics A90-003-01 and A89-003-01 are control modules in Gasonics plasma processing equipment, mainly used as system control boards or interface boards to coordinate the operation of various subsystems in the equipment, such as plasma source control, chamber vacuum system, lifting platform, gas flow rate, load lock transport and other modules. This module is usually installed inside the main control chassis of the device, and completes the control logic of the whole machine by connecting the main CPU board with components such as actuators and sensors.

2、 Application Fields

1. Plasma Asher equipment

Control the RF power output, gas channel, solenoid valve, and vacuum pump operation status;

Integrate with HMI touch screen/control panel to execute user commands.

2. Load lock system and automatic handling unit

Control the upper and lower arm, load lock chamber vacuum switching, and lifting mechanism actions;

Linkage with robot arms and chamber doors to achieve precise handling processes.

3. System bus and sensor interface control

Receive sensor signals such as temperature, pressure, and flow rate;

Send a switch to the execution unit PWM、 Simulate voltage/current control signals.

4. Equipment safety and interlocking system

Implement hardware security mechanisms such as system level alarm response, emergency stop control, and door lock linkage;

Support self check, self recovery, and anomaly diagnosis.

Product imag

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