Gasonics 02-20-01 Indoor Transfer Robot

Gasonics 02-20-01 Indoor Transfer Robot

Product Details Introduction

1、 Product Overview

Gasonics 02-20-01 is an In Chamber Transfer Robot designed specifically for semiconductor plasma processing equipment. This robot is responsible for precise handling and positioning of wafers or workpieces inside the equipment chamber, usually working in a high cleanliness and vacuum environment to ensure safe and fast loading, unloading, transfer, and alignment of wafers during plasma processing. Its mechanical structure is compact, the action is flexible, and it is equipped with a high-precision drive system and position feedback device.

2、 Application Fields

1. Semiconductor plasma stripping and cleaning equipment

As a handling device for wafers inside the cavity, it enables the transfer of wafers from the load lock to the processing cavity;

Support multi axis linkage to ensure precise wafer alignment and improve process repeatability.

2. Automated wafer manufacturing production line

Collaborate with robotic arms and loading and unloading systems in highly automated production environments to complete continuous production operations;

Reduce the pollution risk caused by manual operation.

3. Thin film deposition and etching equipment

As a critical material handling step, ensure the safe and efficient transfer of wafers between different process steps;

Adapt to the processing requirements of wafers of different sizes.

4. Research and experimental platform

Plasma equipment used for research institutions and process development platforms, facilitating quick sample switching and supporting multi process validation.

Product imag

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