Gasonics NL-10256-16 waveguide sensor

Gasonics NL-10256-16 waveguide sensor

Product Details Introduction

1、 Product Overview

Gasonics NL-10256-16 is a waveguide sensor specifically designed for plasma processing equipment. Its main function is to transmit and detect microwave signals, supporting the stable operation of plasma generators in the equipment. This sensor is designed for the transmission path of high-frequency microwave signals, ensuring efficient signal transmission and waveform integrity, which is helpful for the generation and control of plasma.

2、 Application Fields

1. Plasma stripping and etching equipment

As a key component in the microwave transmission link, it transfers microwave energy to the plasma chamber to maintain plasma stability;

Used for Gasonics plasma equipment such as Aura and PEP.

2. Plasma cleaning system

Ensure effective transmission of microwave source signals and optimize energy input for cleaning processes;

Real time monitoring of waveguide condition to assist in equipment diagnosis.

3. Semiconductor and thin film manufacturing equipment

Ensure precise transmission of microwave frequency and power in processes such as microwave-assisted thin film deposition and surface activation;

Support high-frequency signal transmission to reduce energy loss.

Product imag

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