Gasonics A95-023-03 Valve Assembly

Gasonics A95-023-03 Valve Assembly

Product Details Introduction

1、 Product Overview

Gasonics A95-023-03 is a valve assembly specifically designed for plasma processing equipment, used to control gas flow and gas path switching within the equipment. This valve assembly can accurately regulate the flow of gas into and out of the chamber, ensuring the stability and accuracy of the gas environment required for plasma processes, and is a key component in the gas supply system.

2、 Application Fields

1. Plasma stripping and etching equipment

Control the flow rate and pressure of process gases (such as argon and fluorine gases) entering the reaction chamber;

Realize rapid switching and sealing of gas paths to ensure process stability.

2. Plasma cleaning and surface treatment equipment

Manage the circulation of various reaction gases and support the switching of multiple process parameters;

Ensure the accuracy and response speed of gas supply.

3. Gas management systems in semiconductor manufacturing

Realize gas distribution and control in complex gas path systems;

Suitable for cleanroom environments, reducing the risk of leaks and contamination.

Product imag

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