Gasonics PT-9012-286 Robot Controller Board

Gasonics PT-9012-286 Robot Controller Board

Product Details Introduction

1、 Basic Information

Part number: PT-9012-286

Name: Robot Controller Board

Manufacturer: Gasonics/Novellus (later merged into Applied Materials)

Purpose: Used to control the action execution and feedback processing of wafer transfer robots

2、 Function Description

This control board is the main driving and control unit of the transfer robot in Gasonics plasma stripping equipment, used to achieve the following functions during the automatic wafer loading and unloading process:

Function Description

Motion control controls the precise movement of the X (horizontal), Z (lifting), and θ (rotation) axes of the robotic arm

Position feedback receives position signals from encoders or sensors

Exchange status signals such as Ready, Busy, Error, etc. between the state interlock and the main control system

Presence sensor or vacuum sensor data on the wafer inspection processing arm

Command execution receives action instructions from the main control program (such as pick, place, home)

3、 Applicable equipment

This control board is mainly used for wafer transfer robot control in the following systems:

Gasonics A-2000 / A-2000LL

Gasonics Aura 2000/3010 series

Gasonics PEP 3510/3600 series

Some Gasonics OEM plasma processing equipment is also compatible for use

4、 Interface and Control Structure

Interface Type Function Description

The communication interface usually uses RS-232/RS-422 serial port protocol to communicate with the main control board (such as A90-003)

Signal input limit switch, vacuum detection robot presence

Signal output Robot Ready, At Position, Wafer Gripped

The common power input is+24V or ± 15V (please refer to the equipment label for details)

Product imag

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