Paramount 3156310-041 RF Generator

Paramount 3156310-041 RF Generator 

 Introduction

Paramount 3156310-041 RF generator is an AE digital plasma RF power supply

1. Fully digital power control, high output accuracy

2. Built in arc management to quickly suppress ignition

3. Support pulse RF output and adapt to fine craftsmanship

4. Real time monitoring of impedance, fast response to plasma state

5. Multiple communication protocols for easy access to the main control of the machine

1. Model 3156310-041

2. Installation specifications for rack 3U

3. Support frequency fine-tuning

4. Water cooling+air cooling mixed heat dissipation

5. Equipped with power logging function

Applicable scenarios

1. Semiconductor dielectric etching equipment

2. PECVD thin film deposition process

3. Plasma cleaning of the cavity

4. Replacement of spare parts for semiconductor equipment

5. ALD plasma process power supply

Overall, Paramount 3156310-041 is an AE mature digital RF source and a commonly used spare part for etching and deposition equipment maintenance

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