AE 3156330-160 RF Generator

AE 3156330-160 RF Generator 

 Introduction

AE 3156330-160 is a Paramount 3013 series digital RF power supply, the main power supply unit for semiconductor plasma processes

1. Digital power closed-loop regulation with minimal output fluctuations

2. Built in arc suppression algorithm, quickly extinguishing the ignition inside the chamber

3. Support switching between multiple process modes and adapt to different process formulas

4. Water cooling structure for heat dissipation, stable and continuous high-power operation

5. Comes with multi-channel signal acquisition for convenient remote diagnosis

1. Model 3156330-160, AE Paramount 3013 RF source

2. Rated output power of 3000W

3. Operating frequency 13.56MHz

4. Equipped with dual communication of network port and serial port

5. Front panel LED status indicator light

Applicable scenarios

1. Dry etching equipment for silicon and dielectric layers

2. HDP-CVD high-density thin film deposition

3. Plasma chamber cleaning process

4. ALD plasma enhanced process

5. Replacement of spare parts for semiconductor equipment

Overall, AE 3156330-160 is a 3kW high-power digital RF power supply and a commonly used spare part for high-density deposition and etching equipment maintenance

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