Shinko BX80-070280-11 Wafer Handling and Transfer Robot

Shinko BX80-070280-11 Wafer Handling and Transfer Robot 

 Introduction

Shinko BX80-070280-11 is a vacuum wafer handling robotic arm from Shengang Semiconductor, compatible with TEL etching equipment

1. Multi stage telescopic arm design, flexible pick-up and delivery of blades inside the narrow cavity

2. Low particle motion structure, minimizing particle pollution to the greatest extent possible

3. Vacuum holding of wafers, real-time negative pressure monitoring to prevent wafer dropping

4. Built in collision detection, stop immediately in case of obstacles for protection

5. Smooth servo motion curve reduces the risk of silicon wafer scratches

1. Model BX80-070280-11, Shinko wafer transfer robot

2. Adapt to TEL dry etching cavity internal transmission

3. Vacuum environment operation

4. Supporting machine bus communication

5. Comes with running logs and fault records

Applicable scenarios

1. Transfer of wafers inside the TEL etching machine cavity

2. Silicon wafer handling under vacuum environment

3. Transfer of materials between wafer chambers

4. Complete equipment matching for Dongdian Semiconductor

5. Replacement and maintenance of spare parts for semiconductor equipment

Overall, Shinko BX80-070280-11 is a vacuum chamber internal transmission robotic arm and a core spare part for TEL etching machine maintenance

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