SMC INR-499-203 Dual Channel Chiller

SMC INR-499-203 Dual Channel Chiller 

 Introduction

SMC INR-499-203 dual channel chiller is a semiconductor equipment dual channel constant temperature cooling unit

1. Dual circuit independent temperature control, capable of cooling two loads simultaneously

2. High temperature control accuracy ensures stable wafer process

3. Built in flow and pressure monitoring, automatic water shortage protection

4. Support remote communication of the machine and read the running status

5. Integrated compact body, saving cabinet space

1. Model INR-499-203, SMC dual channel circulating chiller

2. Independent adjustment of dual cooling circuit

3. Comes with a built-in coolant circulation pump and filter

4. Equipped with temperature and flow fault alarms

5. Adapt to the working conditions of semiconductor dust-free workshops

Applicable scenarios

1. Etching machine chamber and RF module cooling

2. Constant temperature cooling system for wafer stage

3. PECVD thin film equipment temperature control cooling

4. Thermal management of semiconductor process equipment

5. Replacement of spare parts for old semiconductor machines

Overall, SMC INR-499-203 dual channel chiller, with one machine and dual cooling channels, is a commonly used temperature control spare part for semiconductor production lines

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