Kawasaki 3NS004S-C001 wafer aligner

Kawasaki 3NS004S-C001 wafer aligner 

 Introduction

Kawasaki 3NS004S-C001 wafer aligner is a 300mm wafer pre alignment unit used for wafer positioning in cleanroom

1. Complete wafer gap positioning at high speed, with short alignment time

2. High positioning accuracy ensures consistency in mechanical arm handling

3. Specialized structure for clean rooms, low particle generation

4. The servo drive operates smoothly, reducing the risk of wafer scratches

5. Comes with a communication interface that can be connected to a robotic arm controller

1. Model 3NS004S-C001, Kawasaki Crystal Circle Pre Alignment Device

2. Compatible with 300mm silicon wafers

3. Servo rotation positioning structure

4. Support wafer gap and edge detection

5. Clean room dedicated low dust design

Applicable scenarios

1.300mm wafer transfer EFEM unit

2. Semiconductor measurement equipment wafer pre positioning

3. Wafer manipulator matching positioning components

4. Alignment of optical detection equipment during loading

5. Replacement and maintenance of spare parts for semiconductor equipment

Overall, Kawasaki 3NS004S-C001 is a commonly used pre alignment preparation part for 300mm machines, and is regularly used for wafer transfer system maintenance

Product imag

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