Varian 9699524S002 Turbopump Controller

Varian 9699524S002 Turbopump Controller

 Introduction

Varian 9699524S002 Turbopump Controller

1. 9699524S002 is specifically designed for the operation control of Turbo-V300HT molecular pump

2. Accurately adjust the pump body speed to smoothly complete the entire process of starting, stopping, and accelerating

3. Comes with multiple circuit protections for overload, leakage, and overvoltage

4. The panel indicator lights intuitively display acceleration, normal, and fault status

5. 9699524S002 supports local button start stop and remote communication control

6. Equipped with RS232 communication, it can be connected to the upper computer for centralized monitoring

7. Power off automatically saves operating parameters, no need to reset when restarting

8. Built in self-test program, automatically troubleshooting hardware faults upon startup

9. Suitable for conventional industrial AC power supply, with strong voltage adaptability

10. Cooling fan assists in heat dissipation, making it less prone to overheating during long-term full load operation

11. Leak detection linkage alarm, timely locking of chamber leakage fault

12. Modular wiring port, easy and convenient disassembly and wiring

13. Anti site electromagnetic interference, stable operation of semiconductor clean room

14. It can record the running time and fault logs for easy maintenance and traceability

15. 9699524S002 has automatic vacuum breaking interlock function for shutdown

Varian 9699524S002 turbo pump has stable and reliable control, complete protection, and is suitable for driving and controlling molecular pumps in vacuum processes

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