VAT 61234-KEAP-AQN Control Butterfly Valve System

VAT 61234-KEAP-AQN Control Butterfly Valve System

 Introduction

VAT 61234-KEPA-AQN Control Butterfly Valve System

1. Integrated drive controller for precise closed-loop control of vacuum pressure

2. Fast response speed, meeting the dynamic voltage regulation requirements of semiconductor processes

3. VAT 61234-KEPA-AQN is equipped with double sealed rotating feedthrough, with low vacuum leakage rate

4. High precision adjustment of butterfly plate angle, stable control of gas conductivity

5. Equipped with valve position feedback signal for real-time monitoring by the upper system

6. Support multiple industrial communication buses and adapt to device master control docking

7. Built in pollution warning prompts for predicting maintenance cycles

8. Modular actuator, easy to disassemble and replace, reduces downtime

9. VAT 61234-KEPA-AQN Tolerant Clean Room Process Gas Operating Conditions

10. The valve body material is corrosion-resistant and suitable for etching and thin film deposition in vacuum pipelines

11. Equipped with anti impact opening and closing logic to reduce the risk of particle generation

12. Wide pressure regulation range, covering high and low vacuum continuous regulation scenarios

13. Built in debugging service interface, supporting parameter calibration and fault diagnosis

14. Compact structure, saving installation space around the vacuum chamber

15. Completed vacuum performance testing at the factory, with excellent consistency in operation

The VAT 61234-KEPA-AQN control butterfly valve system, as a core component for vacuum downstream pressure regulation, is widely used in semiconductor precision process equipment.

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