LINTELLE ENGINE 002-0897-000 database module
Introduction
The LINTELLE ENGINE 002-08970-000 database module is a dedicated data storage and interaction unit for PECVD thin film equipment, responsible for collecting, recording, and transmitting cavity process data
1. Adapt to the exclusive communication protocol of thin film deposition equipment for stable data exchange
2 large capacity local storage for complete retention of multiple batches of process parameter records
3 independent signal isolation circuits to resist cavity RF electromagnetic interference
45V DC standard power supply compatible with semiconductor clean room power supply specifications
5. Aluminum alloy sealed shell, dustproof and moisture-proof, suitable for vacuum equipment working conditions
6 parallel channels for collecting and synchronously recording temperature, pressure, and flow signals
7. Power outage data cache protection to prevent loss of process raw data during shutdown
8 standardized terminal interface docking chambers for various sensor components
9. Built in fault self checking function to quickly locate abnormal data collection
10 wide temperature operating range adaptation equipment for long-term continuous mass production operation
11 Modular Box Disassembly and Replacement for Convenience, Shortening Production Line Shutdown Time
12. Data encryption storage ensures the security of semiconductor process parameters and prevents leakage
13 supports real-time retrieval of historical data by the upper computer for process review
14 Multiple Short Circuit Overcurrent Protection to Prevent Damage to the Chamber Circuit
15 exclusive matching PCB board combination with extremely low signal transmission loss
The LINTELLE ENGINE 002-08970-000 database module is a core data matching unit for PECVD thin film equipment, with stable and reliable data acquisition and storage
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| PMB31B-20200-00 | AMAT 130-0401 | P22NRXC-LSN-NS-02 |
| PMB31B-20116-03 | IEPEP03 | 3BUR001953R1 DSTX 180 |
| PMB31B-20116-02 | NKTU115 | N42HRFN-LNK-NS-00 |
| PMB31B-20116-01 | AMAT 0100-71047 | P21NSXS-LNN-NS-02 |
| PMB31B-20116-00 | IEPMU01 | PFTL101B 5.0KN 3BSE004191R1 |
| PMB31B-20114-03 | IIMPM01 | P2HNRXB-LNN-NS-00 |
| PMB31B-20114-02 | DSQC 223 | PFTL101BER 10.0KN |
| PMB31B-20114-01 | NIAI02 | 3BSE003876R1 RC510 |
| PMB31B-20114-00 | INSEM01 | 57160001-EU DSTX 110 |