MEGA _f 00000-2019-000-801 Linear Servo Drive

MEGA _f 00000-2019-000-801 Linear Servo Drive

 Introduction

MEGA \ _f 00000-2019-000-801 Linear servo driver adapted for high-precision motion control of semiconductor precision linear motor

1. Fully digital closed-loop control, dynamic response, fast start stop, no shaking

2. High bandwidth current loop thrust output is stable and ripple free

3 Supports EtherCAT high-speed bus synchronous multi axis linkage

4 compatible differential analog encoder positioning accuracy in micrometer level

5. Built in dynamic braking and shutdown protection against workpiece impact

6 optocoupler isolation IO channel limit enable signal stability

7. Complete circuit protection for overcurrent, overvoltage, undervoltage, undertemperature, and overheating

40kHz high-speed sampling period trajectory control with small error

9. Convenient disassembly and replacement of small plug-in card structure cabinets

1048V DC power supply adapted to clean workshop power supply standards

11 built-in WizAlg debugging tool with simple parameter settings

12 large areas of copper are laid to dissipate heat for a long time under full load without high temperature

13 strong and weak electrical zoning wiring to isolate radio frequency electromagnetic interference

Quick reading of fault codes using the 14USB debugging interface

15. Precision automation equipment for wafer inspection and lithography

MEGA \ _f 00000-2019-000-801 linear servo drive for precise thrust control and stable communication to meet the long-term production and operation needs of high-end semiconductor equipment

Product imag

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