MKS T3BIA-27092 high-speed exhaust throttle valve

MKS T3BIA-27092 high-speed exhaust throttle valve

 Introduction

MKS T3BIA-27092 high-speed exhaust throttle valve

The MKS T3BIA-27092 integrated high-speed exhaust throttle valve is used for precise pressure regulation downstream of semiconductor vacuum chambers. The valve body and control drive are integrated, with fast pressure control response and high process repeatability.

1. Valve control integrated design, no need for additional external control board, saving cabinet wiring space

2. High speed direct drive baffle structure, full stroke opening and closing time less than 0.2 seconds, rapid recovery of pressure disturbance

3. Built in self-tuning algorithm, minimal overshoot, stable locking of process target pressure

4. Dual channel pressure sensor input, automatic range switching, wide dynamic pressure control range

5. The voltage control accuracy can reach 0.25% of the full range, meeting the requirements of precision processes such as etching and thin film deposition

6. Support dual mode control of pressure/baffle positioning, which can be freely switched through communication

7. Compatible with DeviceNet and analog multi class communication protocols, easy to interface with device controllers

8. Non volatile storage, retains process parameters and calibration data when powered off, and avoids repeated calibration when powered on

9. Built in ESD, surge, and RF filtering circuits to resist plasma electromagnetic interference

10. Kalrez corrosion-resistant seals, resistant to various semiconductor process corrosive gases

11. 316L stainless steel valve body, low exhaust clean structure, reduces wafer particle pollution

12. Two independent alarm relay outputs, real-time signal feedback for overpressure and faults

13. Soft start adjustable function, smooth pressure fluctuations, reduce particle disturbance in the chamber

14. Metal dustproof heat dissipation shell, valve body can withstand high temperature conditions up to 105 ℃

15. Million cycles of service life, low failure rate during long-term continuous production line operation

In summary, the MKS T3BIA-27092 high-speed exhaust throttle valve has fast response, precise pressure control, and high integration, making it the core valve component for pressure control in semiconductor vacuum equipment chambers.

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