VAT 02112-AA44-0001 Rectangular Gate Valve

VAT 02112-AA44-0001 Rectangular Gate Valve

 Introduction

VAT 02112-AA44-0001 Rectangular Gate Valve

VAT 02112-AA44-0001 belongs to the MONOVAT 021 series vacuum rectangular gate valve, which is used for semiconductor equipment cavity isolation, wafer transfer channel sealing, high cleanliness and low dust generation, and is suitable for high vacuum process environments.

1. Rectangular straight channel, large conductivity, unobstructed wafer transport

2. Bellows sealed drive rod to prevent external gas from infiltrating the vacuum chamber

3. Close the mechanical self-locking and maintain the seal without leakage after the gas is cut off

4. FKM fluororubber seals, resistant to process corrosive gases

5. 316L stainless steel valve body, low exhaust cleanliness meets semiconductor standards

6. Pneumatic dual drive, smooth opening and closing, minimal vibration

7. Built in limit switch, real-time feedback of on/off position signal

8. Low particle generation structure reduces wafer contamination and yield loss

9. Ultra long cycle life, over 2 million maintenance free cycles

10. Suitable for various vacuum chambers such as Loadlock, etching, and thin film deposition

11. Compact body, equipment cavity installation saves space

12. Flange standard interface, easy to disassemble, replace and maintain

13. Wide vacuum adaptation, capable of maintaining ultra-high vacuum sealed environment

14. Resistant to plasma corrosion and production line process gas erosion

15. Standardized electrical signals can be directly connected to the main control linkage of the equipment

In summary, VAT 02112-AA44-0001 rectangular gate valve has strong sealing, high cleanliness, durability and corrosion resistance, and is the core valve component for semiconductor vacuum equipment chamber isolation and wafer transfer.

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