DAIHEN 3Z80-001051-V2 Digital Plasma Controller

DAIHEN 3Z80-001051-V2 Digital Plasma Controller

 Introduction

DAIHEN 3Z80-001051-V2 Digital Plasma Controller

DAIHEN 3Z80-001051-V2 is a digital control board for Daheng Semiconductor RF power supply, which controls the plasma output power and matches the cavity process

1. Original factory compatible TEL wafer equipment RF generator unit, interface perfectly matched

2. Fully digital closed-loop control, high precision and minimal fluctuation in RF power output

3. Optoelectronic isolation signal channel, shielding RF high-frequency interference

4. Multi layer PCB with strong and weak electrical partition wiring to avoid signal crosstalk

5. Sunken gold fingers, clean workshop long-term operation is not easy to oxidize

6. Real time collection of voltage, current, and standing wave signals for dynamic matching

7. Built in multiple hardware protections for over power, over temperature, and standing wave anomalies

8. Onboard status indicator light, quickly locate RF circuit faults

9. Standard plug-in card structure, easy to disassemble, repair and replace

10. Industrial high-temperature resistant components, suitable for dust-free and constant temperature production environments

11. Strengthen wiring to resist equipment vibration and reduce the risk of virtual soldering

12. Support device bus communication and real-time interaction with the overall controller

13. Built in hardware self-test, power on verification of all control circuits

14. Accurate impedance adjustment logic, stable maintenance of plasma state

15. Compliant with electrical safety regulations for semiconductor clean equipment

Overall, DAIHEN 3Z80-001051-V2 plasma control has high precision, resistance to radio frequency interference, and factory compatibility, making it a core control spare part for the RF system of wafer etching equipment

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