Daihen SVD-121-X1784 Wafer Alignment Instrument

Daihen SVD-121-X1784 Wafer Alignment Instrument

 Introduction

Product Features of Daihen SVD-121-X1784 Wafer Alignment Instrument

Daihara DAIHEN factory matching, compatible with 300mm semiconductor etching and deposition equipment wafer transfer cavity

High precision optical scanning sensing, non-contact recognition of wafer edges and notch markings

Micro level positioning level, center deviation control ≤ 0.08mm, angle error ± 0.02 °

High speed alignment calculation program, short single wafer calibration time, improves the overall production cycle of the machine

Vacuum adsorption bearing platform, suitable for silicon wafers and quartz wafers, without back scratches or contamination

The servo rotation module runs smoothly, suppresses shaking, and is compatible with ultra-thin and fragile wafers

Class1 clean machine design, low gas release and low dust emission material, matched with dust-free workshop standards

Real time monitoring of multiple vacuum pressures, automatic alarm for vacuum leaks, to prevent wafer dropping

All metal shielding shell, isolating cavity RF electromagnetic interference, stable sensing signal without drift

Split modular structure, can be disassembled and repaired separately, greatly reducing the downtime of the machine

Simultaneously supporting both gap and flat edge wafer benchmark recognition, suitable for multi specification process wafers

Standardized equipment bus communication, real-time transmission of alignment deviation data to the main control

Sealed low dust bearing components, supporting 7 × 24-hour uninterrupted clean workshop operation

Multiple sets of fault status indicator lights, quickly distinguish between vacuum, sensing, and motor abnormal faults

Small and compact body structure, suitable for devices with narrow transmission chambers and built-in installation space

The Daihen SVD-121-X1784 wafer alignment device is a core positioning unit for 300mm wafer transfer, with high alignment accuracy and excellent cleanliness performance, ensuring stable handling and process.

Product imag

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