LAM 02-405890-00 Digital Dynamic Controller

LAM 02-405890-00 Digital Dynamic Controller

 Introduction

LAM 02-405890-00 Digital Dynamic Controller Product Features

LAM factory specific control unit, adapted for dynamic process control of semiconductor etching equipment cavity

High speed digital computing chip, millisecond level real-time response to chamber pressure and RF parameter changes

Multi channel isolated analog acquisition channel, accurately reading MFC and vacuum gauge sensing signals

Built in RF shielding circuit to resist high-frequency electromagnetic interference from the cavity, with no signal drift

Integrated hardware safety protection for overvoltage, overcurrent, static electricity, and short circuit

Multiple independent digital I/O ports, linked with air valves, baffles, and endpoint detection components

Support local backplane bus and Ethernet dual channel, bidirectional transmission of process data

Dynamic closed-loop adjustment algorithm, stable control of etching rate, high consistency of wafer process

Onboard multi-channel status indicator light, quickly locate acquisition, communication, and output faults

Cleanroom specific three proof coating, low gas release material, to avoid wafer particle contamination

Standard plug-in rack structure, quick replacement and maintenance without disassembling the cavity

Wide temperature industrial components, 7 × 24-hour continuous operation in dust-free workshop

Built in fault log storage, recording abnormal parameters for easy traceability of production line issues

Synchronous timing output function, realizing collaborative synchronization of multi cavity process actions

Factory calibration of all channel parameters, no need for re debugging when replacing the same model

The LAM 02-405890-00 digital dynamic controller is the core process control module of the etching machine, with high regulation accuracy and strong anti-interference ability, ensuring stable output of the wafer process.

Product imag

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