Gasonics 90-2736 Controller Module

Gasonics 90-2736 Controller Module

Product Details Introduction

product name

Gasonics 90-2736 Controller Module

Gasonics Controller Module

1、 Product Overview

The Gasonics 90-2736 controller module is the core control component applied in the Gasonics series plasma ashing equipment, mainly used to coordinate the operation status of various subsystems inside the equipment, including gas flow rate, temperature control, RF matching, power distribution, etc. As a component of the equipment control system, this module works in conjunction with other I/O cards, valve control cards, temperature control modules, etc. to achieve fully automatic process control logic.

2、 Technical parameters

Module Type: Main Controller/System Control Logic Module

Equipment platform: Gasonics Aura, L2100, L3510, AE2001 and other series plasma equipment

Interface type:

Backplane Bus connection

Standard signal lines are connected to I/O control boards, valve control modules, temperature control cards, etc

Input signal:

From the operating interface, sensors (temperature, pressure, RF power)

Output control:

Send control signals to sub modules such as valve control, power supply, temperature control, electromagnetic relay, etc

Functional features:

Process sequence control

Security interlock logic management

Fault alarm triggering and status feedback

Power requirements:+5V,+12V, or ± 15V DC (depending on specific hardware configuration)

Status feedback: equipped with LED status lights, used to display operation and fault status

Product imag

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